电子气体是半导体制造的关键，高纯电子级二氧化碳在集成电路中尤为重要。新国标《GB/T43772-2024》对二氧化碳纯度有严格要求。
国际半导体设备与材料组织（SEMI ）在2018年C3.57-0312中，对二氧化碳产品的纯度要求要达到 99.999% 以上，杂质限量在ppm级别。随着集成电路行业的发展，我国新制定的国标《GB/T43772-2024 电子气体 二氧化碳》中对二氧化碳品的纯度要求已达到 5N以上，对气体杂质要求达1~5ppm，其中总硫要求低至10ppb
本文件规定了二氧化碳的技术要求、采样、试验方法、检验规则、标志、包装、运输、贮存及安全信息的要求。
本文件适用于由高纯二氧化碳经纯化制备的电子用二氧化碳。
名称：预分离柱
固定相：高分子聚合物（乙基苯乙烯和二乙烯苯的共聚物）
规格：4m*3mm（内径）
粒度：0.18mm-0.25mm
型号：HH-GFZ-IV
材质：不锈钢
应用：GB_T 43772-2024 电子气体 二氧化碳中总硫测定
适用于：安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE
浩瀚色谱（山东）应用技术开发有限公司，研制的《电子气二氧化碳中总硫测定预分离色谱柱》柱效高，预分离好，均不干扰总硫的测定，面积外标法定量，结果满意。
Electronic gases are crucial for semiconductor manufacturing, and high-purity electronic grade carbon dioxide is particularly important in integrated circuits. The new national standard GB/T43772-2024 has strict requirements for the purity of carbon dioxide.
According to the International Semiconductor Equipment and Materials Organization (SEMI) in C3.57-0312 of 2018, the purity requirement for carbon dioxide products must be above 99.999%, with impurity limits at the ppm level. With the development of the integrated circuit industry, the purity requirement for carbon dioxide products in China's newly formulated national standard "GB/T43772-2024 Electronic Gas Carbon Dioxide" has reached 5N or above, and the requirement for gas impurities is 1-5ppm, with a total sulfur requirement as low as 10pppb
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide.
Name: Pre separation column
Fixed phase: Polymer (copolymer of ethylstyrene and divinylbenzene)
Specification: 4m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-GFZ-IV
Material: Stainless steel
Application: GB_T 43772-2024 Determination of Total Sulfur in Electronic Gas Carbon Dioxide
Applicable to: Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a "Pre separation Chromatographic Column for Total Sulfur Determination in Electronic Gas Carbon Dioxide" with high column efficiency, good pre separation, and no interference with the determination of total sulfur. The quantitative method is based on external standard method with satisfactory results.
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