国际半导体设备与材料组织（SEMI ）在2018年C3.57-0312中，对二氧化碳产品的纯度要求要达到 99.999% 以上，杂质限量在ppm级别。随着集成电路行业的发展，我国新制定的国标《GB/T43772-2024 电子气体 二氧化碳》中对二氧化碳品的纯度要求已达到 5N以上，对气体杂质要求达1~5ppm。
本文件规定了二氧化碳的技术要求、采样、试验方法、检验规则、标志、包装、运输、贮存及安全信息的要求。
本文件适用于由高纯二氧化碳经纯化制备的电子用二氧化碳
浩瀚色谱（山东）应用技术开发有限公司，研制的《电子气二氧化碳中总烃测定玻璃微球色谱柱 》柱效高，总烃峰型对称，不分叉，面积外标法定量，结果满意。
名称：分离柱
固定相：硅烷化玻璃微球
规格：3m*3mm（内径）
粒度：0.18mm-0.25mm
型号：HH-BLWQ
材质：不锈钢
应用：GB_T 43772-2024电子气体二氧化碳
适用于安捷伦，岛津，赛默飞，瓦里安，布鲁克，PE，磐诺，北分瑞利，东西电子，天瑞，天美，科创
According to the International Semiconductor Equipment and Materials Organization (SEMI) in C3.57-0312 of 2018, the purity requirement for carbon dioxide products must be above 99.999%, with impurity limits at the ppm level. With the development of the integrated circuit industry, the purity requirement for carbon dioxide products in China's newly formulated national standard "GB/T43772-2024 Electronic Gas Carbon Dioxide" has reached 5N or above, and the requirement for gas impurities is 1-5ppm.
This document specifies the technical requirements, sampling, testing methods, inspection rules, labeling, packaging, transportation, storage, and safety information requirements for carbon dioxide.
This document applies to electronic carbon dioxide prepared by purifying high-purity carbon dioxide
Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. has developed a glass microsphere chromatography column for the determination of total hydrocarbons in electronic gas carbon dioxide. The column has high column efficiency, symmetrical total hydrocarbon peak shapes, no branching, and can be quantified by area external standard method with satisfactory results.
Name: Separation Column
Fixed phase: Silanized glass microspheres
Specification: 3m * 3mm (inner diameter)
Particle size: 0.18mm-0.25mm
model: HH-BLWQ
Material: Stainless steel
Application: GB_T 43772-2024 Electronic Gas Carbon Dioxide
Suitable for Agilent, Shimadzu, Thermo Fisher, Varian, Brooke, PE， Panno, Beifen Ruili, Dongxi Electronics, Tianrui, Tianmei, Sci Tech Innovation
滕州市浩瀚色谱仪器技术服务有限公司
电话：0632-5667636
传真：0632-5667636
手机：15562228838,13963221227
地址：山东滕州市平行路（商务部和技术部）
邮箱：wangxiaoying9@126.com
QQ:1404939462
联系人：王经理
网址：www.haohansepu.com