利用气相色谱仪对三氯氢硅中的氯硅烷进行了分析检测。结果表明:选择程序升温能更好的将各种氯硅烷进行分离,当载气流速为20ml/min,参比流速为30ml/min时,方法的灵敏度最高;利用标准物质以及同系物沸点规律对三氯氢硅中的氯硅烷进行了准确定性;以SiCl4为标准物质,通过对相对校正因子的计算,发现各种氯硅烷的相对校正因子都接近于1;用面积百分比法方便、准确、快速的对各种氯硅烷进行了定量分析,定量相对标准偏差小于3%。
名称：DC-550填充柱
规格：3m*1/8
使用温度：240°C
货号：20231123006
应用：三氯氢硅，四氯化硅等分离
Gas chromatography was used to analyze and detect chlorosilane in trichlorosilane. The results show that selecting programmed heating can better separate various chlorosilanes. When the carrier gas flow rate is 20ml/min and the reference flow rate is 30ml/min, the sensitivity of the method is the highest; Accurate characterization of chlorosilane in trichlorosilane was carried out using standard substances and the boiling point law of homologues; By using SiCl4 as the standard substance and calculating the relative correction factors, it was found that the relative correction factors of various chlorosilanes were close to 1; The area percentage method was used for convenient, accurate, and rapid quantitative analysis of various chlorosilanes, with a relative standard deviation of less than 3%.
Name: DC-550 filled column
Specification: 3m * 1/8
Operating temperature: 240 ° C
Product number: 2023112306
Application: Separation of trichlorosilane, tetrachlorosilane, etc
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